Committees
Advisory Committee
Chair Yasuo Tarui Tokyo University of Agri.&Tech. Japan
Masanori Komuro New Energy and Industrial Technology Development Organization Japan
Masatoshi Migitaka Toyota Technological Institute  Japan
Masao Otaki Toppan Printing Co., Ltd. Japan
Norio Saito Nippon Institute of Technology Japan
Yoshio Tanaka Luminescent Technologies Incorporated Japan
 
Organizing Committee
Chair Toshiyuki Horiuchi Tokyo Denki University Japan
Vice Chair Masato Shibuya Tokyo Polytechnic University Japan
Uwe Behringer UBC Microelectronics Germany
Parkson Chen Taiwan Mask Corporation Taiwan
Han-ku Cho Samsung Electronics Co., Ltd Korea
Brian J. Grenon Grenon Consulting, Inc. USA
Hideaki Hamada HTL Co. Japan Ltd. Japan
Naoya Hayashi Dai Nippon Printing Co., Ltd. Japan
Morihisa Hoga Dai Nippon Printing Co., Ltd. Japan
Eiichi Hoshino Nikon Corporation Japan
Greg Hughes International SEMATECH USA
Hiroichi Kawahira Sony Corporation Japan
Toshio Konishi Toppan Printing Co., Ltd. Japan
Yuichi Matsuzawa Toppan Printing Co., Ltd. Japan
Warren Montgomery SEMATECH - Accelerating the next technology revolution USA
Ichiro Mori Semiconductor Leading Edge Technologies, Inc. Japan
Osamu Nagarekawa HOYA Corporation Japan
Kenichiro Okuda SEMI Japan Japan
Yoshiki Suzuki KLA-Tencor Japan Ltd. Japan
Tadahiro Takigawa Brion Technologies K.K. Japan
Koichiro Tsujita Canon Inc. Japan
Wataru Wakamiya JEOL Ltd. Japan
Anto Yasaka SII NanoTechnology Inc. Japan
Nobuyuki Yoshioka Renesas Electronics Corp. Japan
 
Steering Committee
Chair Morihisa Hoga Dai Nippon Printing Co., Ltd. Japan
Vice Chair Hiroaki Morimoto Toppan Printing Co., Ltd. Japan
Vice Chair Tsuneo Terasawa Semiconductor Leading Edge Technologies, Inc. Japan
Takayuki Abe NuFlare Technology Inc. Japan
Naoya Hayashi Dai Nippon Printing Co., Ltd. Japan
Kunihiro Hosono Renesas Electronics Corp. Japan
Naoyuki Ishiwata Fujitsu Semiconductor Limited  Japan
Ichiro Kagami Sony Corporation Japan
Kokoro Kato SII NanoTechnology Inc. Japan
Toshio Konishi Toppan Printing Co., Ltd. Japan
Hiroshi Mohri DAI NIPPON PRINTING Co.,LTD. Japan
Takeshi Nakajima KLA-Tencor Japan Ltd. Japan
Masatoshi Oda NTT Advanced Technology Japan
Yasushi Ohkubo HOYA Corporation Japan
Hiroyuki Shigemura Semiconductor Leading Edge Technologies, Inc. Japan
Toshiyuki Takahashi JEOL Ltd. Japan
Kiwamu Takehisa Lasertec Corporation Japan
Hiroyoshi Tanabe Intel K.K. Japan
Hidehiro Watanabe Toshiba Corp. Japan
 
Program Committee
Chair Toshio Konishi Toppan Printing Co., Ltd. Japan
Vice Chair Ichiro Kagami Sony Corporation Japan
Vice Chair Kokoro Kato SII NanoTechnology Inc. Japan
Vice Chair Hiroshi Mohri DAI NIPPON PRINTING Co.,LTD. Japan
Shinji Akima Toppan Printing Co., Ltd. Japan
Akihiko Ando Renesas Electronics Corp. Japan
Jeff Farnsworth Intel Corporation USA
Thomas B. Faure IBM Corp. USA
Shigeru Hirukawa Nikon Corp. Japan
Koji Hosono Fujitsu Semiconductor Limited Japan
Gregg Inderhees KLA-Tencor Corp. USA
Curt A. Jackson Toppan Photomasks, Inc. USA
Byung-Gook Kim Samsung Electronics Co., Ltd. Korea
John Lin Taiwan Semiconductor Manufacturing Co., Ltd. Taiwan
Mark Ma Photronics, Inc. USA
Koji Murano TOSHIBA Corporation Japan
Yoshikazu Nagamura Renesas Electronics Corp. Japan
Yoshinori Nagaoka KLA-Tencor Japan Ltd. Japan
Yasutoshi Nakagawa JEOL Ltd. Japan
Noriaki Nakayamada NuFlare Technology Inc. Japan
Nobuyuki Nishiguchi Semiconductor Technology Academic Research Center Japan
Yuji Nonami Panasonic Corporation Japan
Schlze Schulz Mentor Graphics Corp. USA
Yoshiyuki Sekine Canon Inc. Japan
Yasunari Sohda Hitachi, Ltd. Japan
Osamu Suga Semiconductor Leading Edge Technologies, Inc. Japan
Minoru Sugawara Sony Corporation Japan
Koji Takagi Applied Materials Japan, Inc. Japan
Kiwamu Takehisa Lasertec Corporation Japan
Tatsuya Tomita Dai Nippon Printing Co., Ltd. Japan
Yoichi Usui HOYA Corporation Japan
Kenji Yamazoe Canon Inc. Japan