PMJ2021 will be held on
April 26(Mon.)-28(Wed.), 2021.

What's New!

Photomask Japan 2021 is the 27th international symposium on photomasks and NGL masks in Japan. The aim of the symposium is to bring together engineers and investigators from Japan, USA, and all over the world in the field of photomasks, NGL masks, and related technologies to discuss recent progress, applications, and future trends. The conference program will feature invited papers, contributed papers, poster sessions, and a rump session with panel discussion. Display opportunities will be provided to mask manufacturing materials, and equipment companies.

Program Summary of Past PMJs (Written in Japanese)

Topics

  • Materials for photomasks
  • Fabrication process steps and equipment for photomasks (developing, etching, cleaning etc.)
  • Photomask writing tools and technologies including multi-beam EB writer
  • Tools and technologies for metrology/ inspection/ repair
  • Technologies and Infrastructures for EUVL/ NIL/ FPD masks
  • EDA, MDP, curvilinear ILT and DTCO
  • Photomasks with RET: PSM, OPC, SMO and multiple patterning
  • Photomask-related lithography technologies
  • NGL mask technologies and their applications: DSA and others
  • Strategy and business challenges: cost, cycle time and total mask solutions
  • Patterning technologies for semiconductor and electronic devices
  • Semiconductor manufacturing technologies
  • eBeam direct writing and eBeam lithography technologies
  • Photomask and lithography related technologies in academia (poster Session)
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